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Fault Detection in the Semiconductor Etch Process Using the Seasonal Autoregressive Integrated Moving Average Modeling
Muhammad Zeeshan Arshad, Javeria Muhammad Nawaz and Sang Jeen Hong
Page: 429~442, Vol. 10, No.3, 2014
10.3745/JIPS.04.0004
Keywords: Autoregressive Integrated Moving Average, Dynamic Time Warping, Fault Detection, Seasonal Autoregressive Integrated Moving Average, Semiconductor Process, Time Series Modeling
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