Search Word(s) in Title, Keywords, Authors, and Abstract: Seasonal Autoregressive Integrated Moving Average

Fault Detection in the Semiconductor Etch Process Using the Seasonal Autoregressive Integrated Moving Average Modeling
Muhammad Zeeshan Arshad, Javeria Muhammad Nawaz and Sang Jeen Hong
Page: 429~442, Vol. 10, No.3, 2014
10.3745/JIPS.04.0004
Keywords: Autoregressive Integrated Moving Average, Dynamic Time Warping, Fault Detection, Seasonal Autoregressive Integrated Moving Average, Semiconductor Process, Time Series Modeling
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